Intel Foundry and ASML Push High NA EUV toward Wider Production
At the SPIE Photomask Technology + EUV Lithography conference, Intel Foundry and ASML highlighted continued progress bringing High Numerical Aperture EUV lithography into production. High NA is already in high-volume manufacturing at Intel Foundry, with more than one million wafers processed, and work advancing reticle stitching and the transition to 6x12-inch masks.